Aims and Fit of Module

This module aims to familiarise students with some basic concepts of the basic processes for micro/nano manufacturing technology and to prepare students for entering the micro/nano electronic industry.

Learning outcomes

A. Apply the essential knowledge and skills of micro & nanofabrication integrated circuit facility in a clean room
B. Understand the advanced micro & nanofabrication technology and theoretical underpinning for emerging microelectronic devices 
C. Apply micro & nanofabrication processes in the industry-oriented tasks
D. Perform designing and fabricating materials, devices, and circuits at the micro and nanoscale
E. Enhance key professional skills: independent learning and teamwork for IC technology
F. Conduct various analysis and evaluating methods to fabricate technology-based project

Method of teaching and learning

The module is taught through formal lectures, class tutorials and laboratory experiments.