Aims and Fit of Module

This module aims to familiarise students with some basic concepts of the basic processes for micro/nano manufacturing technology and to prepare students for entering the micro/nano electronic industry.

Learning outcomes

A. Gain knowledge of micro & nanofabrication facility in a clean room.
B. Understand micro & nanofabrication technology and theoretical underpinning.
C. Understand micro & nanofabrication processes.
D. Use commercial micro & nanofabrication facility to design and fabricate materials, devices, and circuits at the micro and nanoscale.
E. Show experience and enhancement of the following key skills: independent learning, team work, and time management.

Method of teaching and learning

The module is taught through formal lectures, class tutorials and laboratory experiments.