Aims and Fit of Module

This module aims to familiarise students with some basic concepts of the basic processes for micro/nano manufacturing technology and to prepare students for entering the micro/nano electronic industry.

Learning outcomes

A. Demonstrate a mastery of micro & nanofabrication process.

B. Understand micro & nanofabrication technology and theoretical underpinning.

C. Understand micro & nanofabrication fabrication and related analysis.

D. Have proper understanding of commercial micro & nanofabrication facility.

E. Demonstrate familiarity with the operation principles and applications to design and fabricate materials, devices, and circuits at the micro and nanoscale.

Method of teaching and learning

The module is taught through formal lectures, class tutorials and laboratory experiments.