This module aims to familiarise students with some basic concepts of the basic processes for micro/nano manufacturing technology and to prepare students for entering the micro/nano electronic industry.
A. Apply the essential knowledge and skills of micro & nanofabrication integrated circuit facility in a clean room B. Understand the advanced micro & nanofabrication technology and theoretical underpinning for emerging microelectronic devices C. Apply micro & nanofabrication processes in the industry-oriented tasks D. Perform designing and fabricating materials, devices, and circuits at the micro and nanoscale E. Enhance key professional skills: independent learning and teamwork for IC technology F. Conduct various analysis and evaluating methods to fabricate technology-based project
The module is taught through formal lectures, class tutorials and laboratory experiments.